11th NARECOM – NAnoEnviCz REsearch COmmunity Meeting

11th NARECOM – NAnoEnviCz REsearch COmmunity Meeting
10th November 2021 from 2:30 p.m.

Juraj Jašík
J. Heyrovský Institute of Physical Chemistry of the CAS, v. v. i., Department of Nanocatalysis
Vacuum Apparatuses for the Deposition of Size - and Composition Selected Clusters

We present two high vacuum instruments dedicated to preparation of precisely atom-by-atom size- and composition selected metal clusters supported on model or technologically relevant substrates. The ionized clusters are produced by high flux magnetron sputtering aggregation sources. The size selection is achieved by radiofrequency quadrupole mass filters. The first instrument is optimized for deposition of sub-nanometer clusters with masses up to 2000 a.m.u. while the second one is able to reach nanometer size of clusters up to the mass of 16000 a.m.u. The number and density of deposited clusters are monitored by measuring the cluster flux on the support and precisely controlled by semi-automated custom software written in Python. A special design of the instruments allows the preparation of multiple samples on supports of various sizes and shapes at the same time.

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